1. what does the output 50ug/ml, for example, consist of?
If using pure oxygen as the starting gas the mix would be primarily oxygen with a small amount of ozone.
50ug of ozone for each ml of total output (ozone and oxygen)?
Yes.
2. Why when the oxygen input increases, the amount of the ozone output decreases? For example: 1 LPM yields 9.3 ug/ml, but 1/2 LPM yields 20.5ug/ml.
This is because the faster the oxygen flows past the electrodes there is less time for the oxygen to react with the corona. With less oxygen being converted in to ozone the unreacted oxygen dilutes the ozone concentration.